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Nanolithography - 9780857095008
Un libro in lingua di Feldman Martin (EDT) edito da Elsevier Science Ltd, 2013
- € 241.10
- Il prezzo è variabile in funzione del cambio della valuta d’origine
Lithography is the process of patterning and etching to create integrated circuits and other devices on semiconductor wafers. Photolithography cannot be scaled down much further, so in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions, scientists have turned to alternative nanolithography technologies. In addition to scaling issues, the increasing integration of multiple functions within a single device poses further challenges which drive innovations in nanolithography and nanofabrication. Part one covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), electron beam and ion beam lithography, while part two covers applications of nanolithography.
Informazioni bibliografiche
- Titolo del Libro in lingua: Nanolithography
- Sottotitolo: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems
- Lingua: English
- Autore: Feldman Martin (EDT)
- Editore: Elsevier Science Ltd
- Collana: Elsevier Science Ltd (Hardcover)
- Data di Pubblicazione: 30 Novembre '13
- Genere: TECHNOLOGY and ENGINEERING
- Pagine: 573
- Dimensioni mm: 228 x 152 x 0
- ISBN-10: 0857095005
- EAN-13: 9780857095008