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Surfaces, Interfaces, and Thin Films for Microelectronics - 9780470174470

Un libro in lingua di Irene Eugene A. edito da John Wiley & Sons Inc, 2008

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Detailing fundamentals and important analytical techniques, Irene (chemistry, University of North Carolina-Chapel Hill) helps scientists and engineers understand existing microelectronic applications and design new ones. Chapters in Part I of the book explain surface science fundamentals, covering both geometric and electronic structure, surface thermodynamics, morphology, and a sample of surface science techniques. Part II covers microelectronics applications such as films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the silicon-silicon dioxide interface, and other MOSFET interfaces. The book can be used as a self-study guide for professionals in the electronics industry, and as a text for upper-level undergraduate and graduate students taking courses in materials science, chemistry, physics, and electrical engineering. Annotation ©2008 Book News, Inc., Portland, OR (booknews.com)

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