Handbook of Plasma Processing Technology

Un libro in lingua di Rossnagel Stephen M. Cuomo Jerome J. Westwood William D. (EDT) edito da Elsevier Science Ltd, 1990

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Plasma processing currently provides the most practical way to carry out many of the process steps involved in integrated circuitry. This overviews of the technology describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields. Annotation copyright Book News, Inc. Portland, Or.

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